The purity of the air in cleanrooms is ensured by means of multi-stage filtering and high airflow. With regard to the way that cleanrooms are aerated and ventilated, there are two basic cleanroom systems. Either turbulent or low-turbulence flow is used. For cleanrooms with turbulent dilution flow, the filtered clean air is introduced to the cleanroom in a turbulent manner and the “mixed air” is extracted. This enables continuous dilution of the particle concentration. To achieve a higher air exchange rate, a laminar flow cleanroom is required in cleanroom classes ISO 1 to ISO 5. In this case, a continuous, low-turbulence displacement flow is used. For this reason, flow velocity, total volume flow and the calculated air exchange rate are among the crucial parameters of your cleanroom. DIN EN ISO 14644-3 lays down rules on how measurement can be carried out in turbulent as well as in low-turbulence flows.

• Adherence to the guidelines and stipulations on indoor air quality by measurement of the flow velocity and the volume flow in cleanrooms

• Determination of the air exchange rate in a plant with turbulent mixed air via the total volume flow rate

• Measurement technology according to DIN EN ISO 14644:2005 Part 3

Valuable information on measurements of air temperature, relative air humidity and differential pressure as well as on flow velocity testing in cleanrooms

• The most important norms

• Useful tips on measurements

• Measuring instrument requirements

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